Thinking Ahead combined know-how and expertise

At AURION we bring together know-how and expertise from different disciplines, most important prerequisite to develop processes as well as to realize components and complete systems for specific, individual solutions. Furthermore we constantly develop new, cost saving and environmentally friendly technologies and help optimizing existing processes to increase efficiency.

Learn more about the AURION project cycle and its potential.


Atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems as well as combinations thereof, including cluster and inline tools.


Radio frequency components like Automatic Impedance Matching Networks (Matchboxes), Switches, Filters, Power Splitters, Phase Shifters etc.


Aurion´s team offers its extensive expertise in the areas of plasma technology and radio frequency technology for consulting services and training classes.

We are members of

Meet us at workshops and trade shows

  1. IPAC 2022, Bangkok (Thailand)

    Location: Bangkok (Thailand)

    The 13th International Particle Accelerator Conference is the main international event for the worldwide accelerator community and industry. Attendees will be presented with cutting-edge accelerator research and development results and gain the latest insights into accelerator facilities across the globe.

  2. HIAT 2022, Darmstadt

    Location: Darmstadt

    The 15th International Conference on Heavy Ion Accelerator Technology will take place in Darmstadt between June 27 and July 01, 2022.


  3. PSE 2022, Erfurt

    Location: Erfurt

    The 18th International Conference on Plasma Surface Engineering.

AURION Anlagentechnik GmbH

Am Sandborn 14
63500 Seligenstadt

+49(0) 6182 96 28 -0

+49(0) 6182 96 28 -16

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