Thinking Ahead combined know-how and expertise

At AURION we bring together know-how and expertise from different disciplines, most important prerequisite to develop processes as well as to realize components and complete systems for specific, individual solutions. Furthermore we constantly develop new, cost saving and environmentally friendly technologies and help optimizing existing processes to increase efficiency.

Learn more about the AURION project cycle and its potential.


Atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems as well as combinations thereof, including cluster and inline tools.


Radio frequency components like Automatic Impedance Matching Networks (Matchboxes), Switches, Filters, Power Splitters, Phase Shifters etc.


Aurion´s team offers its extensive expertise in the areas of plasma technology and radio frequency technology for consulting services and training classes.

We are members of

Meet us at workshops and trade shows

  1. PSE 2022, Erfurt

    Location: Erfurt

    The 18th International Conference on Plasma Surface Engineering.

  2. BSBF 2022, Granada (E)

    Location: Granada (E)

    The 2nd Big Science Business Forum is a business oriented congress which congregates all the European Research Infrastructures, focused on technology and with the aim to be the main meeting point between Research Infrastructures and industry.

  3. PLASMA GERMANY, Steinhagen

    Location: Steinhagen, Germany

    PLASMA GERMANY meets in Steinhagen on 8th and 9th of November 2022.

AURION Anlagentechnik GmbH

Am Sandborn 14
63500 Seligenstadt

+49(0) 6182 96 28 -0

+49(0) 6182 96 28 -16

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