Thinking Ahead combined know-how and expertise

At AURION we bring together know-how and expertise from different disciplines, most important prerequisite to develop processes as well as to realize components and complete systems for specific, individual solutions. Furthermore we constantly develop new, cost saving and environmentally friendly technologies and help optimizing existing processes to increase efficiency.

Learn more about the AURION project cycle and its potential.


Atmospheric pressure plasma sources, RIE, microwave downstream plasma, PVD (Sputtering) and PECVD systems as well as combinations thereof, including cluster and inline tools.


Radio frequency components like Automatic Impedance Matching Networks (Matchboxes), Switches, Filters, Power Splitters, Phase Shifters etc.


Aurion´s team offers its extensive expertise in the areas of plasma technology and radio frequency technology for consulting services and training classes.

We are members of

Meet us at workshops and trade shows

  1. 20th Plasma Technology Conference (PT20)

    Location: Bochum

    The host is the Chair of Applied Electrodynamics and Plasma Technology in cooperation with the Research Department Plasmas with Complex Interactions and the Deutsche Gesellschaft für Plasmatechnologie e.V. (DGPT).

  2. IPAC 2023, Venice (Italy)

    Location: Venice (Italy)

    The 14th International Particle Accelerator Conference is the main international event for the worldwide accelerator community and industry. Attendees will be presented with cutting-edge accelerator research and development results and gain the latest insights into accelerator facilities across the globe.

  3. V2023 - Vacuum & Plasma

    Location: Dresden

    The V Conference is the meeting place for the vacuum, plasma and coating industry. Speakers and exhibitors from industry and science will present the latest developments and innovations in the industry to the trade audience.

    Meet with the European community. Discover the exhibiting companies. These leading companies offer new opportunities and innovative products to advance your projects.

    The V Conference is the largest European platform for the exchange of business and science.


AURION Anlagentechnik GmbH

Am Sandborn 14
63500 Seligenstadt

+49(0) 6182 96 28 -0

+49(0) 6182 96 28 -16

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