COMPACT-MW
Features
- Compact systems, minimized footprint
- High plasma densities for short process times
- Optimized homogeneity by plasma-array with 2-dimensional gas inlet system
- High loading capacity
PIKNOS 30 MW
General data
| Dimensions (WxDxH): | 1.0 x 0.8 x 1.8 m | |
| Chamber volume: | 30 l | |
| Supply voltage: | 3/N/PE AC 400/230V | |
| Gas supply: | Up to 4 mass flow controllers with a flow rate of up to 500 sccm each | |
Microwave-supply
| Frequency: | 2.45 GHz | |
| Max. power: | 2 kW, pulsed 4 kW | |
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Sterilization and Barrier Coating
Aurion has developed a process for the sterilization and barrier coating of hollow objects (like e.g. PET-bottles). Please contact us to discuss the implementation of this technology for your application