Cluster Systems

AURION offers multi chamber systems with substrate handling under vacuum taylored to your needs. Available configurations include load lock chambers, transfer chambers and process modules for sputter and RIE processes.

Cluster-Anlagen       Cluster-Anlagen

Inline Systems

AURION offers inline (pass-by) systems with substrate transport under vacuum taylored to your needs. Available configurations include load lock chambers, pre-treatment chambers and sputter chambers. Vertical and horizontal layouts are available.